The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 21, 2025

Filed:

Jun. 22, 2022
Applicant:

Commissariat a L'energie Atomique ET Aux Energies Alternatives, Paris, FR;

Inventors:

Guillaume Jourdan, Grenoble, FR;

Sébastien Hentz, Grenoble, FR;

Fabrice-Roland Lamberti, Grenoble, FR;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
B81B 7/02 (2006.01); B81B 3/00 (2006.01); G01D 5/26 (2006.01); G01N 21/77 (2006.01); G01P 15/093 (2006.01); G01P 15/097 (2006.01); G01V 8/20 (2006.01); G02B 6/12 (2006.01); G02B 6/293 (2006.01);
U.S. Cl.
CPC ...
B81B 3/0021 (2013.01); B81B 7/02 (2013.01); G02B 6/12009 (2013.01); G02B 6/29395 (2013.01); B81B 2201/0271 (2013.01); B81B 2203/0118 (2013.01); B81B 2203/0127 (2013.01); G01D 5/268 (2013.01); G01N 21/7746 (2013.01); G01P 15/093 (2013.01); G01P 15/097 (2013.01); G01V 8/20 (2013.01); G02B 2006/12097 (2013.01); G02B 2006/121 (2013.01); G02B 2006/12107 (2013.01); G02B 2006/1214 (2013.01); G02B 6/293 (2013.01); G02B 6/29335 (2013.01);
Abstract

A MEMs and/or NEMs measurement system includes a resonant assembly comprising: an input and an output, a plurality of N optical resonators Ri indexed i each having a resonance wavelength λr,i, at least one waveguide to which the optical resonators are coupled, at least one element coupled to each resonator Ri, an emission device, a modulation device, an injection device configured to superpose the N light beams to form an input beam and to inject the beam as input to the resonant assembly, at least one detector configured to detect a light beam arising from the beam at the output of the resonant assembly and to generate an output signal, a demodulation device comprising at least N synchronous-detection demodulation modules.


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