The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 21, 2025

Filed:

Dec. 28, 2021
Applicant:

Canon Kabushiki Kaisha, Tokyo, JP;

Inventor:

Shinichi Shudo, Saitama, JP;

Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
B29C 33/42 (2006.01); B29C 33/04 (2006.01); B29C 59/00 (2006.01); B29C 59/02 (2006.01); B29C 37/00 (2006.01); G03F 7/00 (2006.01);
U.S. Cl.
CPC ...
B29C 59/02 (2013.01); B29C 33/04 (2013.01); B29C 33/424 (2013.01); B29C 59/002 (2013.01); B29C 2037/90 (2013.01); G03F 7/0002 (2013.01);
Abstract

The present invention provides an imprint apparatus including a holding member configured to hold the mold, a spring member configured to connect the holding member to a base unit that supports the holding member, a driving unit provided between the holding member and the base unit and configured to drive the holding member in a vertical direction with respect to the base unit, and a regulating surface configured to regulate, in a vertical range in which the holding member is driven by the driving unit, a driving end on a side that is towards the base unit, wherein the driving unit performs a driving for pressing the holding member against the regulating surface, and in the driving, generates heat while pressing the holding member against the regulating surface.


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