The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 21, 2025
Filed:
Oct. 20, 2022
Canon Kabushiki Kaisha, Tokyo, JP;
Naoki Maruyama, Tochigi, JP;
CANON KABUSHIKI KAISHA, Tokyo, JP;
Abstract
An imprint apparatus according to the present invention includes a controller configured to perform a contacting step of moving at least one of a mold holding unit and a substrate holding unit by at least one of a mold driving unit and a substrate driving unit such that a mold and an imprint material on a substrate surface are brought into contact with each other, an obtaining step of obtaining a driving force in a first direction parallel to the substrate surface for the substrate holding unit by the substrate driving unit after performing the contacting step, and a tilt correcting step of rotating the mold holding unit about a second direction perpendicular to the first direction in the substrate surface by the mold driving unit based on a magnitude of the driving force obtained in the obtaining step.