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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 12446471 B1

PDFFull Text
Date of Patent:
Oct. 14, 2025

Filed:

Dec. 16, 2022

Piezoelectric single-crystal element, mems device using same, and method for manufacturing same

Applicant:

Ibule Photonics, Incheon, KR;

Inventor:

Sang Goo Lee, Incheon, KR;

Assignee:

IBULE PHOTONICS, Incheon, KR;

Attorney:

Revolution IP, PLLC

Primary Examiner:

Moazzam Hossain

Int. Cl.
CPC ...
H10N 30/30 (2023.01); B81B 7/02 (2006.01); B81C 1/00 (2006.01); H03H 9/56 (2006.01); H10N 30/05 (2023.01); H10N 30/87 (2023.01);
U.S. Cl.
CPC ...
H10N 30/302 (2023.02); B81B 7/02 (2013.01); B81C 1/00015 (2013.01); H03H 9/564 (2013.01); H10N 30/05 (2023.02); H10N 30/872 (2023.02); B81B 2201/0285 (2013.01); B81B 2203/0118 (2013.01); B81B 2203/0353 (2013.01); B81B 2203/04 (2013.01); B81C 2201/013 (2013.01); B81C 2201/0181 (2013.01);
Abstract

The present disclosure relates to a piezoelectric single-crystal element, a MEMS device using same, and a method for manufacturing same, wherein the piezoelectric single-crystal element includes a wafer, a lower electrode stacked on the wafer, a piezoelectric single-crystal thin film stacked on the lower electrode, and an upper electrode stacked on the piezoelectric single-crystal thin film, wherein the piezoelectric single-crystal thin film is composed of PMN-PT, PIN-PMN-PT or Mn:PIN-PMN-PT, and the piezoelectric single-crystal thin film has a polarization direction set to a <001> axis, a <011> axis or a <111> axis, and a MEMS device using same.

Find Patent Forward Citations

Lee, Sang. (2025). Piezoelectric single-crystal element, mems device using same, and method for manufacturing same (U.S. Patent No. 12446471). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/12446471

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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