The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 14, 2025

Filed:

Feb. 07, 2022
Applicant:

Auburn University, Auburn, AL (US);

Inventor:

Jason V. Clark, Auburn, AL (US);

Assignee:

AUBURN UNIVERSITY, Auburn, AL (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 41/04 (2006.01); B81B 3/00 (2006.01); H01L 41/047 (2006.01); H10N 30/20 (2023.01); H10N 30/857 (2023.01);
U.S. Cl.
CPC ...
H10N 30/2023 (2023.02); B81B 3/0021 (2013.01); B81B 3/0035 (2013.01); H10N 30/857 (2023.02); B81B 2201/03 (2013.01);
Abstract

In at least one illustrative embodiment, a microelectromechanical system (MEMS) includes a composable piezoelectric actuator electrically coupled to a terminal. In response to a voltage applied across electrodes of the actuator, a piezoelectric rod moves from an initial position to a displaced position. In an embodiment, the MEMS includes two terminals, a resistive element is coupled between the terminals, and when in the displaced position the rod contacts one of the terminals. In an embodiment, the MEMS includes three terminals, and when a threshold voltage is applied to one of the terminals, the rod moves to the displaced position and allows current to flow between the other two terminals. In an embodiment, the MEMS includes a primary set of actuators that are mechanically but not electrically connected to a secondary set of actuators. An output terminal is coupled to the second set of actuators. Other embodiments are described and claimed.


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