The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 14, 2025
Filed:
Apr. 16, 2019
University-industry Cooperation Group of Kyung Hee University, Yongin-si, KR;
Jin Jang, Seoul, KR;
Su Hui Lee, Seoul, KR;
UNIVERSITY-INDUSTRY COOPERATION GROUP OF KYUNG HEE UNIVERSITY, Yongin-si, KR;
Abstract
Disclosed is a method of fabricating an oxide semiconductor thin-film transistor, the method including a step of forming an oxide semiconductor layer including a channel region, a source region, and a drain region on a substrate; a step of forming a gate insulating layer on the channel region; a step of forming a gate electrode on the gate insulating layer; and a step of forming a source electrode and a drain electrode on the source and drain regions, respectively, wherein the step of forming an oxide semiconductor layer includes a step of selectively plasma-treating the source and drain regions of the oxide semiconductor layer with a fluorine (F)-based gas, and the source and drain regions contain fluorine (F) at a concentration of 2×10/cmto 17.5×10/cm.