Semiconductor device, electronic system including the same, and method of fabricating the same

Abstract

A semiconductor device includes a substrate having cell and connection regions, and a stack structure having dielectric layers and electrodes that are vertically and alternately stacked on the substrate. The stack structure includes a first pad part, a first fence part, a second pad part, and a second fence part that are sequentially arranged along a first direction. Each of the first and second pad parts has a first stepwise structure formed along the first direction and a second stepwise structure formed along a second direction that intersects the first direction, and each of the first and second fence parts includes dummy electrodes at the same levels as the electrodes and spaced apart from the electrodes. Sidewalls of the electrodes that define second stepwise structure of the second part are offset from sidewalls of the dummy electrodes that define second dummy stepwise structure of the first pad part.