The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 14, 2025

Filed:

May. 27, 2022
Applicant:

Mitsui Chemicals Ict Materia, Inc., Tokyo, JP;

Inventors:

Hiroto Yasui, Sodegaura, JP;

Hiroyoshi Kurihara, Nagoya, JP;

Jin Kinoshita, Nagoya, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/683 (2006.01); C09J 133/10 (2006.01); H01L 21/304 (2006.01);
U.S. Cl.
CPC ...
H01L 21/6836 (2013.01); C09J 133/10 (2013.01); H01L 21/3043 (2013.01); H01L 2221/68327 (2013.01); H01L 2221/6834 (2013.01); H01L 2221/68386 (2013.01);
Abstract

A method for manufacturing an electronic device includes a step (A) of preparing a structure which includes a wafer including a circuit forming surface, and an adhesive film bonded to the circuit forming surface side of the wafer, a step (B) of back-grinding a surface of the wafer on a side opposite to the circuit forming surface side, and a step (C) of irradiating the adhesive film with an ultraviolet ray and then removing the adhesive film from the wafer. The adhesive film includes a base material layer, and an adhesive resin layer configured with an ultraviolet curable adhesive resin material. The ultraviolet curable adhesive resin material has a storage elastic modulus at 5° C. E' (5° C.) after curing of 2.0×10to 2.0×10Pa, and a storage elastic modulus at 100° C. E′ (100° C.) of 1.0×10to 3.0×10Pa.


Find Patent Forward Citations

Loading…