The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 14, 2025

Filed:

Oct. 28, 2022
Applicant:

Thermo Finnigan Llc, San Jose, CA (US);

Inventors:

Scott T. Quarmby, Round Rock, TX (US);

Edward Mccauley, Cedar Park, TX (US);

Assignee:

Thermo Finnigan LLC, San Jose, CA (US);

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01J 49/24 (2006.01); C23C 14/06 (2006.01); C23C 14/14 (2006.01); H01J 49/10 (2006.01);
U.S. Cl.
CPC ...
H01J 49/24 (2013.01); C23C 14/0641 (2013.01); C23C 14/14 (2013.01); H01J 49/10 (2013.01);
Abstract

A mass spectrometer system includes a vacuum manifold; an ion source positioned within the vacuum manifold for ionizing a sample; a mass analyzer for analyzing sample ions; a high vacuum pump connected to the vacuum manifold operable to maintain the pressure within the vacuum manifold at an operating pressure; and a controller configured to raise the pressure in the ion source to a sputtering pressure by supplying a flow of a sputtering gas and either reducing a speed of a high vacuum pump or isolating the ion source from the high vacuum pump; cause a conducting material to be sputtered on a surface of the ion source; and reduce the pressure in the ion source to an operating pressure by reducing the flow of the sputtering gas and either increasing the speed of the high vacuum pump or restoring connectivity between the ion source and the high vacuum pump.


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