The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 14, 2025

Filed:

Apr. 18, 2022
Applicant:

Asm America, Inc., Phoenix, AZ (US);

Inventor:

Michael Gilliam Ulrich, Delran, NJ (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/32 (2006.01); C23C 16/50 (2006.01); C23C 16/52 (2006.01); H01L 21/66 (2006.01); H03H 7/40 (2006.01); H03H 11/30 (2006.01);
U.S. Cl.
CPC ...
H01J 37/32183 (2013.01); C23C 16/50 (2013.01); C23C 16/52 (2013.01); H01L 22/26 (2013.01); H03H 7/40 (2013.01); H03H 11/30 (2013.01); H01J 2237/24564 (2013.01); H01J 2237/332 (2013.01); H01J 2237/334 (2013.01);
Abstract

In one embodiment, an impedance matching network includes variable capacitors. A first variable capacitor has a terminal electrically connected to the RF input. A second variable capacitor has a terminal electrically connected to the RF output. At least one of the variable capacitors is an electrically variable capacitor (EVC). The EVC includes a plurality of parallel-coupled capacitors comprising fine capacitors increasing in capacitance and coarse capacitors having a greater capacitance. A capacitor position for the EVC for enabling an impedance match is determined by a processor using software. An impedance match is enabled by directly switching the electronically variable capacitor to the determined capacitor position.


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