The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 14, 2025
Filed:
Jan. 12, 2024
Applied Materials, Inc., Santa Clara, CA (US);
Ryan T. Downey, San Jose, CA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
Disclosed herein are a plasma source, an abatement unit, and a method for detecting a coolant leak. The plasma source includes an RF generation system coupled with a cooling system. The RF generation system includes one or more electrical components comprising a hollow RF antenna for generating a plasma. The cooling system includes a coolant channel extending through the plasma source, including the electrical components of the RF generation system; a first flow control device coupled to the coolant channel to control a flow of the coolant into the coolant channel and electrically isolated from the hollow antenna; a second flow control device coupled to the coolant channel to control a flow of the coolant out of the coolant channel; and a pressure measurement device coupled with the coolant channel to measure a pressure level of the coolant. The coolant channel includes the hollow RF antenna.