The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 14, 2025
Filed:
Feb. 04, 2024
Huazhong University of Science and Technology, Hubei, CN;
HUAZHONG UNIVERSITY OF SCIENCE AND TECHNOLOGY, Hubei, CN;
Abstract
A method for parameter extraction of a sensitive probe and degree-of-freedom coupling calculation of a capacitive displacement sensor is provided. Through applying multiple groups of charge excitations to the mechanically sensitive probe with a multi-conductor structure, the electrostatic field distribution inside the sensitive probe under each group of excitation charges is obtained by numerical calculation to compute the electrostatic field energy, thereby finally extracting the complete distributed capacitance matrix of the sensitive probe. For the couplings among the multi-degree-of-freedom displacements caused by the sensitive probe, through establishing an indefinite admittance matrix of the sensitive probe and connecting the subsequent multi-channel sensing circuits, a complete equivalent circuit model for multi-degree-of-freedom coupling analysis is obtained to quantitatively calculated the degree-of-freedom coupling caused by displacement of the test mass.