The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 14, 2025
Filed:
Dec. 08, 2023
Semes Co., Ltd., Cheonan-si, KR;
Yong Jun Lee, Cheonan-si, KR;
SEMES CO., LTD., Cheonan-si, KR;
Abstract
Proposed is a substrate inspecting apparatus and an operating method of the substrate inspecting apparatus capable of detecting and correcting angle of incidence (AOI) distortion occurring during an optical-based substrate inspection process. The substrate inspecting apparatus includes a light source generating incident light, an illumination optical system forming an optical path of the incident light, an imaging optical system forming an optical path of reflected light reflected from a substrate, a light detector that receives the reflected light and converts the received reflected light into an electrical signal, and a processor that generates a spectral image from the electrical signal.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile