The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 14, 2025
Filed:
Apr. 04, 2024
Applied Materials, Inc., Santa Clara, CA (US);
Hanhong Chen, Milpitas, CA (US);
Kenneth Brian Doering, San Jose, CA (US);
Sanjeev Baluja, Campbell, CA (US);
Chi-Chou Lin, San Jose, CA (US);
Kevin Griffin, Livermore, CA (US);
Joseph Aubuchon, San Jose, CA (US);
Zhejun Zhang, Santa Clara, CA (US);
Rohit Ode, Morgan Hill, CA (US);
Tejas Umesh Ulavi, Fremont, CA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
Plasma showerhead assemblies are disclosed comprising a conductive plate having a plurality of the conductive plate gas openings, a dielectric faceplate having a thickness and a plurality of dielectric faceplate gas openings extending through the dielectric faceplate thickness in fluid communication with the plurality of the conductive plate gas openings. A conductive insert is disposed within at least one of the dielectric faceplate gas openings or adjacent o-rings included in the plasma showerhead assemblies.