The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 14, 2025
Filed:
Jun. 13, 2023
Meiden Nanoprocess Innovations, Inc., Tokyo, JP;
MEIDEN NANOPROCESS INNOVATIONS, INC., Tokyo, JP;
Abstract
An ozone gas supply system includes a buffer tank for temporarily storing a high-concentration ozone gas supplied from an ozone vessel of an ozone gas supply unit, and for supplying the high-concentration ozone gas to an ozone gas utilization system. A control section detects a decrease in the ozone concentration in the buffer tank, based on a value of pressure of the ozone vessel at a predetermined temperature, with reference to a relationship between temperature and pressure of an ozone gas having an ozone concentration of 100% and a relationship between temperature and pressure of an ozone gas having an ozone concentration of less than 100%. In response to detection of a decrease in the ozone concentration in the buffer tank, gas within the buffer tank is exhausted out of the system, and the high-concentration ozone gas is thereafter supplied from the ozone vessel to the buffer tank.