The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 14, 2025

Filed:

Jun. 24, 2022
Applicant:

Universal Display Corporation, Ewing, NJ (US);

Inventors:

William E. Quinn, Whitehouse Station, NJ (US);

Craig Anthony Outten, Rydal, PA (US);

Kent Khuong Nguyen, San Jose, CA (US);

Steven Shigeki Aochi, San Jose, CA (US);

Neil D. Nguyen, Milpitas, CA (US);

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 14/22 (2006.01); C23C 14/04 (2006.01); C23C 14/12 (2006.01); C23C 14/24 (2006.01);
U.S. Cl.
CPC ...
C23C 14/24 (2013.01); C23C 14/04 (2013.01); C23C 14/12 (2013.01); C23C 14/228 (2013.01);
Abstract

Embodiments of the disclosed subject matter provide a system having at least one carrier gas source, at least one heated container that includes organic material, and a jet array print head that includes a plurality of apertures to print lines on a substrate, and that is connected to a vacuum source. The system includes a pair of gas bearing plates, with a top gas bearing plate and a bottom gas bearing plate, each having a plurality of pressure apertures and vacuum apertures. The top gas bearing plate applies a uniform force to a top surface of the substrate, and the bottom gas bearing plate applies a uniform force to a bottom surface of the substrate. The top gas bearing plate includes a slot configured for the print head to fit within. The vacuum apertures are arranged perpendicular to a direction of travel of the substrate.


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