The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 14, 2025
Filed:
Mar. 28, 2019
Samsung Display Co., Ltd., Yongin-si, KR;
Hyun-Sook Park, Yongin-si, KR;
Chang-Mog Jo, Yongin-si, KR;
Hee-Cheol Kang, Yongin-si, KR;
Yun-Mi Lee, Yongin-si, KR;
Un-Cheol Sung, Yongin-si, KR;
Yong-Sup Choi, Yongin-si, KR;
Jong-Heon Kim, Yongin-si, KR;
Jae-Kwang Ryu, Yongin-si, KR;
Samsung Display Co., Ltd., Yongin-si, KR;
Abstract
A thin film deposition apparatus that can be simply applied to produce large-sized display devices on a mass scale and that improves manufacturing yield. The thin film deposition apparatus includes a deposition source that discharges a deposition material; a deposition source nozzle unit disposed at a side of the deposition source and including a plurality of deposition source nozzles arranged in a first direction; and a patterning slit sheet disposed opposite to the deposition source nozzle unit and including a plurality of patterning slits arranged in a second direction that is perpendicular to the first direction. A deposition is performed while the substrate or the thin film deposition apparatus moves relative to each other in the first direction, and the deposition source, the deposition source nozzle unit, and the patterning slit sheet are formed integrally with each other.