The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 14, 2025
Filed:
Oct. 28, 2022
Applicant:
Tokuyama Corporation, Yamaguchi, JP;
Inventors:
Assignee:
Tokuyama Corporation, Yamaguchi, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C01B 33/107 (2006.01); C23C 16/24 (2006.01); C23C 16/54 (2006.01);
U.S. Cl.
CPC ...
C01B 33/1071 (2013.01); C23C 16/24 (2013.01); C23C 16/545 (2013.01);
Abstract
[Problem to be solved] Provided is a method that enables effective industrial use of an exhaust gas containing hydrogen to be discharged during production of trichlorosilane. [Solution] Provided is a method for producing trichlorosilane, the method comprising: reacting metallic silicon and tetrachlorosilane with a mixed gas containing hydrogen to generate trichlorosilane. The mixed gas containing hydrogen contains 1 to 500 molar ppm of hydrogen chloride and 100 to 10,000 molar ppm of silane hydride, and the mixed gas is heated at 100° C. to 450° C. and then reacted.