The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 07, 2025

Filed:

Nov. 16, 2021
Applicants:

Samsung Electronics Co., Ltd., Suwon-si, KR;

Seoul National University R&db Foundation, Seoul, KR;

Inventors:

Kyungwook Hwang, Seoul, KR;

Ho Won Jang, Seoul, KR;

Junsik Hwang, Hwaseong-si, KR;

Jehong Oh, Seoul, KR;

Jungel Ryu, Seoul, KR;

Seungmin Lee, Seoul, KR;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 33/12 (2010.01); C30B 25/04 (2006.01); C30B 25/18 (2006.01); C30B 29/40 (2006.01); H10H 20/01 (2025.01); H10H 20/815 (2025.01); H10H 20/825 (2025.01);
U.S. Cl.
CPC ...
H10H 20/815 (2025.01); C30B 25/04 (2013.01); C30B 25/186 (2013.01); C30B 29/403 (2013.01); H10H 20/0137 (2025.01); H10H 20/825 (2025.01);
Abstract

Provided are a semiconductor structure and a method of manufacturing the same. The semiconductor structure includes a substrate, a membrane bridge that defines, with the substrate, a plurality of cavities, and a nitride semiconductor layer arranged on the membrane bridge. The membrane bridge and the substrate have the same crystal structure. The membrane bridge has an upper surface with a constant height with respect to a surface of the substrate.


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