The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 07, 2025
Filed:
Jul. 01, 2021
Applicant:
Shenzhen China Star Optoelectronics Semiconductor Display Technology Co., Ltd., Shenzhen, CN;
Inventor:
Macai Lu, Shenzhen, CN;
Assignee:
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
H10D 86/01 (2025.01); H10D 30/67 (2025.01); H10D 86/40 (2025.01); H01L 25/16 (2023.01);
U.S. Cl.
CPC ...
H10D 86/0221 (2025.01); H10D 30/6755 (2025.01); H10D 86/423 (2025.01); H01L 25/167 (2013.01);
Abstract
A manufacturing method of an array substrate, the array substrate, and a display panel are provided. In the manufacturing method of the array substrate, by forming an oxide material layer including aluminum atoms on a gate electrode metal layer, and by heating the oxide material layer to allow the aluminum atoms to capture oxygen in the oxide semiconductor layer, an aluminium oxide is formed, and by making the oxide in the oxide semiconductor layer to lose oxygen to become conductive, a source electrode region and a drain electrode of a thin film transistor are formed.