The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 07, 2025
Filed:
Aug. 27, 2020
Applicant:
Hisanori Aga, Tokyo, JP;
Inventor:
Hisanori Aga, Tokyo, JP;
Assignee:
MITSUMI ELECTRIC CO., LTD., Tokyo, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H02N 2/02 (2006.01); G02B 26/08 (2006.01); H01L 41/047 (2006.01); H01L 41/187 (2006.01); H10N 30/00 (2023.01); H10N 30/50 (2023.01); H10N 30/853 (2023.01); H10N 30/87 (2023.01);
U.S. Cl.
CPC ...
H02N 2/028 (2013.01); H10N 30/50 (2023.02); H10N 30/704 (2024.05); H10N 30/8548 (2023.02); H10N 30/8554 (2023.02); H10N 30/878 (2023.02); G02B 26/0858 (2013.01);
Abstract
A piezoelectric actuator includes a substrate, and a drive structure formed on the substrate, wherein the drive structure includes a piezoelectric thin film, and an average grain size of the piezoelectric thin film is smaller than or equal to 1 μm.