The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 07, 2025
Filed:
Oct. 28, 2020
Yamaha Robotics Holdings Co., Ltd., Tokyo, JP;
Yamaha Robotics Holdings Co., Ltd., Tokyo, JP;
Abstract
An ultrasound vibrating-type defect detection apparatus () for detecting a defect in a semiconductor apparatus () is provided with: an ultrasound vibrator (); a high-frequency power supply (); a camera (); and a controller () for adjusting the frequency of high-frequency power supplied from the high-frequency power supply () to the ultrasound vibrator (), and for performing detection of a defect in the semiconductor apparatus (). The controller () causes the camera () to capture an image of the semiconductor apparatus () while varying the frequency of high-frequency power supplied from the high-frequency power supply () to the ultrasound vibrator (), and performs detection of a defect in the semiconductor apparatus () on the basis of the captured image.