The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 07, 2025

Filed:

May. 04, 2022
Applicant:

Applied Materials, Inc., Santa Clara, CA (US);

Inventor:

Vladimir Nagorny, Tracy, CA (US);

Assignee:

Applied Materials, Inc., Santa Clara, CA (US);

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/66 (2006.01); C03C 17/36 (2006.01); G01T 1/24 (2006.01); G05B 15/02 (2006.01); H01J 37/32 (2006.01);
U.S. Cl.
CPC ...
H01L 22/12 (2013.01); G05B 15/02 (2013.01); H01J 37/32 (2013.01); H01J 37/32348 (2013.01); H01J 37/32926 (2013.01); H01J 37/32935 (2013.01); C03C 17/36 (2013.01); G01T 1/24 (2013.01); H01J 2237/24585 (2013.01);
Abstract

Devices, assemblies, and system including a plasma delivery device comprising a memory element that stores a first state or a second state. The memory element is configured to receive a first signal that causes the memory element to change between the first state and the second state. The plasma delivery device further includes a switch coupled to the memory element. The switch is configured to change between an open configuration and a closed configuration. The plasma delivery device further comprises a plasma emitter coupled to the switch. The plasma emitter is configured to be selectively activated and deactivated. The plasma emitter supplies plasma related fluxes to an environment proximate the plasma delivery device responsive to being activated. The plasma emitter is configured to receive a second signal that activates the plasma emitter based on the open configuration or the closed configuration of the switch.


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