Charged-particle beam microscope with differential vacuum pressures

Abstract

A charged-particle beam microscope is provided for imaging a sample. The microscope has a housing to enclose a first volume at a first predefined vacuum pressure. A motorized stage is provided to hold and move a sample inside the first volume of the housing. A charged-particle beam module is provided in the housing, the charged-particle beam module including a chamber comprising one or more walls to enclose a second volume at a second predefined vacuum pressure, the second predefined vacuum pressure being substantially less than the first predefined vacuum pressure. The walls of the chamber are adapted to separate the second volume from the first volume and to maintain a pressure differential between the first and second volumes. A charged-particle beam source is provided inside the second volume to generate a charged-particle beam. One or more beam optical components are provided inside the second volume to converge the charged-particle beam onto the sample. One or more beam scanners are provided outside the charged-particle beam module to scan the electron beam across the sample. One or more detectors are provided outside the charged-particle beam module to detect radiation emanating from the sample. A controller analyzes the detected radiation.