The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 07, 2025
Filed:
Oct. 28, 2022
East China University of Science and Technology, Shanghai, CN;
East China University of Science and Technology, Shanghai, CN;
Abstract
The present disclosure provides a machine vision-based automatic focusing and automatic centering method and system. An object stage is controlled to move in an imaging distance range of an electron microscope, and images scanned by the electron microscope when the object stage is at different imaging distances are acquired. The image definition of an object stage image is calculated according to a gray-scale value of each pixel in the object stage image, the imaging position when an image definition value is the maximum is determined, and the object stage is controlled to move to the position to realize machine vision-based accurate focusing. After the accurate focusing is completed, the images that can clearly reflect the arrangement relationship between an indenter and a sample on the object stage are acquired by the electron microscope, and a midline of an indenter area and a midline of a sample area are aligned.