Charged particle beam device, and sample observation method employing same

Abstract

There are provided a charged particle beam device capable of appropriately setting a tilt angle of a sample stage even if an observation surface is larger than the field of view, and a sample observation method using the same. The charged particle beam device is a device for obtaining an observation image of a sample by irradiating the sample with a charged particle beam, and is characterized by including: a sample stage that tilts with respect to each of two tilt axes intersecting with each other and holds the sample as well; a boundary detection unit that detects a boundary between an upper surface and a cleavage surface of the sample from each observation image obtained while changing a tilt angle of the sample stage, and calculates a tilt of the boundary with respect to the scanning direction of a charged particle beam; an upper surface detection unit that detects the upper surface from the observation image for each tilt angle, and calculates an upper surface vanishing angle that is a tilt angle of the sample stage at which the upper surface vanishes from the observation image; and a calculation processing unit that calculates an initial sample direction, which is a direction of the cleavage surface when the tilt angle is zero, on the basis of the tilt of the boundary for each tilt angle and the upper surface vanishing angle.