The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 07, 2025

Filed:

Sep. 22, 2023
Applicant:

Nikon Corporation, Tokyo, JP;

Inventor:

Yamato Niitani, Yokohama, JP;

Assignee:

NIKON CORPORATION, Tokyo, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G02B 21/00 (2006.01); G01N 21/41 (2006.01);
U.S. Cl.
CPC ...
G02B 21/008 (2013.01); G01N 21/41 (2013.01); G01N 2021/4173 (2013.01);
Abstract

A microscope includes light-transmitting-optical-system that irradiates specimen with illumination-light, light-receiving-optical-system that receives signal-light emitted from the specimen, phase-modulation-element that adds predetermined phase distribution to the illumination-light or the signal-light, phase-distribution-measuring-unit that measures first phase distribution, which corresponds to specimen-induced aberration at sampling point of the specimen, at each of a plurality of the sampling points, phase-distribution-calculation-unit that creates phase-data-model showing an amount of phase change which the illumination-light or the signal-light receives when the illumination-light or the signal-light passes through predetermined position in the specimen based on the plurality of first phase distributions, and calculates a second phase distribution which is added to the illumination-light or the signal-light in order to detect detection point of the specimen in a state in which specimen-induced aberration is reduced based on the phase-data-model, and phase-distribution-setting-unit that sets the second phase distribution to the phase-modulation-element.


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