The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 07, 2025

Filed:

Nov. 01, 2023
Applicant:

Sumitomo Electric Industries, Ltd., Osaka, JP;

Inventor:

Ken Kikuchi, Osaka, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01R 31/26 (2020.01); G01R 1/02 (2006.01); G01R 1/04 (2006.01); G01R 1/067 (2006.01); G01R 1/073 (2006.01); H01L 27/02 (2006.01); H01L 27/06 (2006.01); H01L 27/088 (2006.01);
U.S. Cl.
CPC ...
G01R 31/2621 (2013.01); G01R 1/06772 (2013.01);
Abstract

The present disclosure relates to a measurement pattern for measuring a high frequency characteristic of a first element including a first input electrode, a first output electrode, and a first reference electrode. The measurement pattern includes a second element including a second input electrode having a planar shape corresponding to a planar shape of the first input electrode, a second output electrode having a planar shape corresponding to a planar shape of the first output electrode, and a second reference electrode overlapping the second input electrode and the second output electrode, an input pad connected to the second input electrode, an output pad connected to the second output electrode, and a reference pad connected to the second reference electrode, provided from the input pad to the output pad when viewed from a first direction, and having a planar shape linearly symmetric with respect to a virtual straight line.


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