The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 07, 2025
Filed:
Oct. 28, 2022
Seiko Epson Corporation, Tokyo, JP;
Satoru Tanaka, Chino, JP;
SEIKO EPSON CORPORATION, , JP;
Abstract
A physical quantity sensor includes first and second fixed electrode sections on a substrate, a first movable electrode section having a movable electrode opposite a fixed electrode of the first fixed electrode section, a second movable electrode section having a movable electrode opposite a fixed electrode of the second fixed electrode section, first and second fixed sections fixed to the substrate, a first support beam having one end coupled to the first fixed section, a first coupling section coupling the other end of the first support beam and the first movable electrode section, a second support beam having one end coupled to the second fixed section, and a second coupling section coupling the other end of the second support beam and the second movable electrode section. The first movable electrode section, the second fixed section, the first fixed section, and the second movable electrode section are disposed side by side.