The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 07, 2025
Filed:
Mar. 22, 2023
Applicant:
Kokusai Electric Corporation, Tokyo, JP;
Inventors:
Takahiro Miyakura, Toyama, JP;
Atsushi Moriya, Toyama, JP;
Yasuhiro Megawa, Toyama, JP;
Yasunobu Koshi, Toyama, JP;
Akito Hirano, Toyama, JP;
Assignee:
Kokusai Electric Corporation, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C30B 1/02 (2006.01); H01L 21/02 (2006.01);
U.S. Cl.
CPC ...
C30B 1/026 (2013.01); C30B 1/023 (2013.01); H01L 21/02524 (2013.01);
Abstract
There is provided a technique that includes: (a) forming a first film containing a Group 14 element on a substrate at a film-forming temperature; (b) performing a crystal growth of the first film by performing a heat treatment to the first film at a first temperature; and (c) moving the Group 14 element contained in at least part of the first film toward the substrate to crystallize the first film by performing the heat treatment to the first film at a second temperature higher than the first temperature.