The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 07, 2025
Filed:
Nov. 27, 2020
Applicant:
Teknologian Tutkimuskeskus Vtt Oy, Espoo, FI;
Inventor:
Tapio Pernu, Espoo, FI;
Assignee:
Teknologian tutkimuskeskus VTT Oy, Espoo, FI;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G02B 26/08 (2006.01); B81B 3/00 (2006.01); H10N 30/80 (2023.01);
U.S. Cl.
CPC ...
B81B 3/004 (2013.01); G02B 26/0858 (2013.01); H10N 30/802 (2023.02);
Abstract
According to an example aspect of the present invention, there is provided a Microelectromechanical System, MEMS, mirror apparatus, comprising a MEMS mirror and at least two piezo actuators, wherein the at least two piezo actuators are connected to each other and configured to control, or controlling, movement of the MEMS mirror and a single supply drive signal connected to each of the at least two piezo actuators.