The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 07, 2025
Filed:
Apr. 18, 2022
T-robotics Co., Ltd., Osan-si, KR;
Soo Jong Lee, Suwon-si, KR;
Myung Jin Kim, Pyeongtaek-si, KR;
Chang Seong Lee, Hwaseong-si, KR;
Seung Young Baek, Osan-si, KR;
Chang Hyun Jee, Anyang-si, KR;
Sang Hwi Ham, Gunpo-si, KR;
Moon Gi Hur, Gyeonggi-do, KR;
Jae Hyun Park, Osan-si, KR;
Tae Han Lee, Yangju-si, KR;
T-Robotics Co., Ltd., Osan-si, KR;
Abstract
A travel robot for moving a substrate transfer robot in a vacuum chamber, includes: an elevating part located in a lower outer region of a housing, sealing the vacuum chamber, wherein an elevating drive shaft moves through a vacuum chamber through-hole; a travel arm platform through which coupling holes are formed, wherein the elevating drive shaft is inserted into a lower space of one of the coupling holes; a first travel arm part including a (1_1)-st and a (1_2)-nd travel link arms; a second travel arm part including a (2_1)-st and a (2_2)-nd travel link arms, wherein travel driving motors and speed reducers are installed in the (1_1)-st and the (2_1)-st travel link arms; and a transfer robot coupling part engaged with the (1_2)-nd and the (2_2)-nd travel link arms, wherein a rotation driving motor built thereon is engaged with the substrate transfer robot by a rotation drive shaft.