The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 07, 2025

Filed:

Sep. 14, 2022
Applicant:

Tronic Purity, Inc., Hsinchu, TW;

Inventor:

Po-Wei Huang, Hsinchu, TW;

Assignee:

TRONIC PURITY, INC., Hsinchu, TW;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B01D 53/22 (2006.01); B01D 65/02 (2006.01); B01D 69/08 (2006.01);
U.S. Cl.
CPC ...
B01D 53/22 (2013.01); B01D 53/226 (2013.01); B01D 65/02 (2013.01); B01D 69/08 (2013.01); B01D 2053/224 (2013.01); B01D 2256/10 (2013.01); B01D 2257/104 (2013.01); B01D 2257/108 (2013.01);
Abstract

A method for purification of electronic gases and a purification device for the method are disclosed: a purification device is internally equipped with a plurality of hollow fiber tubes for purification and outward discharge of an unpurified electronic gas; a purification device which is not operating gas purification allows purified electronic gases to pass for discharges of fine dusts from the purification device wherein the purified electronic gases after completion of renewal process are delivered into the purification device in which no gas purification is running for restore of backpressure in the device.


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