The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 30, 2025
Filed:
May. 14, 2023
Zilltek Technology Corp., Hsinchu, TW;
ZILLTEK TECHNOLOGY CORP., Hsinchu, TW;
Abstract
A resonant structure in micro electro mechanical systems includes a main body and at least one electrode. The main body has a major axis. The main body includes an induction portion and a support portion. The induction portion has at least one first induction side surface that is not parallel to the major axis. The main body has a plurality of first protruding teeth on the first induction side surface. The electrode has a second induction side surface that is not parallel to the major axis. The electrode has a plurality of second protruding teeth on the second induction side surface. When a separation distance between the first induction side surface and the second induction side surface is changed, a plurality of surfaces of the first protruding teeth and a plurality of surfaces of the second protruding teeth are configured to produce a capacitance change.