The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 30, 2025

Filed:

Feb. 13, 2023
Applicant:

Kulicke and Soffa Industries, Inc., Fort Washington, PA (US);

Inventors:

Matthew B. Wasserman, Fort Washington, PA (US);

Thomas J. Colosimo, Jr., Fort Washington, PA (US);

Assignee:

Kulicke and Soffa Industries, Inc., Fort Washington, PA (US);

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 23/00 (2006.01); B01D 53/40 (2006.01);
U.S. Cl.
CPC ...
H01L 24/75 (2013.01); B01D 53/40 (2013.01); H01L 24/81 (2013.01); B01D 2258/0216 (2013.01); H01L 2224/751 (2013.01); H01L 2224/759 (2013.01); H01L 2224/81065 (2013.01); H01L 2224/81203 (2013.01); H01L 2224/81908 (2013.01); H01L 2224/81986 (2013.01); H01L 2924/40 (2013.01);
Abstract

A method of monitoring gas byproducts of a bonding system is provided. The method includes: providing a plurality of bonding systems, each of the bonding systems including a reducing gas delivery system for use in connection with a bonding operation, each of the bonding systems being configured for exhausting gas byproducts; connecting each of the bonding systems to a monitoring device using a respective gas delivery path; and monitoring a composition of at least a portion of the gas byproducts with the monitoring device.


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