Real-time ai-based quality assurance for semiconductor production machines

Abstract

The subject matter herein provides for AI-based prediction of production defects in association with a production system, such as a semiconductor manufacturing machine. In one embodiment, a method begins by receiving production data from the production system. The production data typically comprises non-homogeneous machine parameters and maintenance data, quality test data, and product and process data. Using the production data, a neural network is trained to model an operation of a given machine in the production system. Preferably, the training involves multi-task learning, transfer learning (e.g., using knowledge obtained with respect to a machine of the same type as the given machine), and a combination of multi-task learning and transfer learning. Once the model is trained, it is associated with the given machine operating environment, wherein it is used to provide quality assurance predictions.