The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 30, 2025
Filed:
Mar. 03, 2023
Applicant:
Viavi Solutions Inc., Chandler, AZ (US);
Inventor:
William D. Houck, Santa Rosa, CA (US);
Assignee:
VIAVI Solutions Inc., Chandler, AZ (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G02B 5/28 (2006.01);
U.S. Cl.
CPC ...
G02B 5/285 (2013.01);
Abstract
An optical interference filter includes a substrate and one or more sets of layers that are disposed on the substrate. Each set of layers includes a first layer that comprises at least scandium, aluminum, and nitrogen, and a second layer that comprises at least silicon and oxygen. The first layer may comprise at least one of a scandium aluminum nitride (ScAlN) material or a scandium aluminum nitrogen oxide (ScAlNO) material. The second layer may comprise a hydrogenated silicon (Si:H) material. An absolute value of a net stress of the one or more sets of layers may be less than or equal to 50 megapascals.