The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 30, 2025
Filed:
Mar. 09, 2021
Samsung Display Co., Ltd., Yongin-Si, KR;
Ji-Hee Son, Hwaseong-si, KR;
Youngmin Moon, Yongin-si, KR;
Duckjung Lee, Hwaseong-si, KR;
Minho Moon, Seongnam-si, KR;
Seungyong Song, Suwon-si, KR;
Seul Lee, Hwaseong-si, KR;
Sungsoon Im, Suwon-si, KR;
Samsung Display Co., Ltd., Yongin-Si, KR;
Abstract
An embodiment provides a deposition apparatus including a mask frame, an opening sheet, a deposition mask, and an electrostatic chuck. In the mask frame, a first opening part is defined. The opening sheet is disposed on the mask frame. In the opening sheet, a second opening part overlapping the first opening part is defined. The deposition mask is disposed on the opening sheet. In the deposition mask, a plurality of third opening parts overlapping the second opening part are defined. The electrostatic chuck is disposed on the deposition mask and on which a substrate is disposed. The substrate is disposed on a surface of the electrostatic chuck, and AC power is applied to the deposition mask.