The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 23, 2025
Filed:
May. 28, 2021
Qorvo Us, Inc., Greensboro, NC (US);
Jyothi Swaroop Sadhu, Apopka, FL (US);
Maria Wang, Richardson, TX (US);
Qorvo US, Inc., Greensboro, NC (US);
Abstract
This disclosure relates generally to a method of making a piezoelectric device. In some embodiments, a foundation structure is provided and a first metal is deposited over at least a first area of a top surface of the foundation structure to form a plurality of metal islands such that the plurality of metal islands self-assemble in a distributed manner over the at least the first area of the top surface of the foundation structure. Additionally, a piezoelectric material is deposited over the at least the first area of the top surface of the foundation structure to form a piezoelectric film over the at least the first area of the top surface of the foundation structure. The piezoelectric material is deposited over the first area of the top surface of the foundation structure to form the piezoelectric film and the piezoelectric film is polarity patterned into at least one non-piezoelectric portion.