The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 23, 2025

Filed:

Jun. 17, 2022
Applicant:

SK Hynix Inc., Icheon-si, KR;

Inventors:

Jin Ho Kim, Icheon-si, KR;

Chang Woo Kang, Icheon-si, KR;

Sang Hyun Sung, Icheon-si, KR;

Chang Man Son, Icheon-si, KR;

Sung Lae Oh, Icheon-si, KR;

Assignee:

SK hynix Inc., Icheon-si, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H10B 41/27 (2023.01); H01L 23/528 (2006.01); H01L 23/535 (2006.01); H10B 41/41 (2023.01); H10B 43/27 (2023.01); H10B 43/40 (2023.01);
U.S. Cl.
CPC ...
H01L 23/5283 (2013.01); H01L 23/535 (2013.01); H10B 41/27 (2023.02); H10B 41/41 (2023.02); H10B 43/27 (2023.02); H10B 43/40 (2023.02);
Abstract

A three-dimensional memory device includes a first electrode structure and a second electrode structure extending in a first direction, being adjacent to each other in a second direction intersecting with the first direction, and each including a plurality of electrode layers and a plurality of interlayer dielectric layers which are alternately stacked on a source plate; a plurality of first slimming holes formed in the first electrode structure to expose pad regions of the electrode layers of the first electrode structure, and arranged in the first direction; and a plurality of second slimming holes formed in the second electrode structure to expose pad regions of the electrode layers of the second electrode structure, and arranged in the first direction, wherein a first slimming hole and a second slimming hole which are adjacent in the second direction have different depths.


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