The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 23, 2025
Filed:
Jan. 18, 2024
Applied Materials, Inc., Santa Clara, CA (US);
Wendell Glenn Boyd, Jr., Morgan Hill, CA (US);
Govinda Raj, Santa Clara, CA (US);
Matthew James Busche, Santa Clara, CA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
Embodiments of the present disclosure provide a method for processing a substrate disposed on a substrate support. The method includes chucking a substrate to a substrate support, monitoring a chucking force on the substrate with a sensor disposed in a backside gas hole of the substrate support, wherein the sensor comprises a sensor assembly disposed in the gas hole and configured to detect a metric indicative of a deflection of a workpiece disposed on the workpiece support surface, wherein the sensor assembly is configured to allow gas to flow past the sensor assembly when positioned in the gas hole and flowing a gas through the backside gas hole past the sensor.