The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 23, 2025
Filed:
Nov. 29, 2021
Samsung Electronics Co., Ltd., Suwon-si, KR;
Seoul National University R&db Foundation, Seoul, KR;
Ajou University Industry-academic Cooperation Foundation, Suwon-si, KR;
Jangwoo You, Seoul, KR;
Kyujin Cho, Seoul, KR;
Changkun Lee, Seoul, KR;
Hongseok Lee, Seoul, KR;
Jesung Koh, Suwon-si, KR;
Yongmin Park, Seoul, KR;
Sunpil Jeong, Seoul, KR;
SAMSUNG ELECTRONICS CO., LTD., Suwon-si, KR;
SEOUL NATIONAL UNIVERSITY R&DB FOUNDATION, Seoul, KR;
AJOU UNIVERSITY INDUSTRY-ACADEMIC COOPERATION FOUNDATION, Suwon-si, KR;
Abstract
A multi-degree of freedom (DOF) moving stage includes: an end-effector; three driven links pivotably connected to the end-effector at angular intervals from each other; three driving links pivotably connected to the three driven links, respectively; and three actuators configured to drive the three driving links, respectively. Each of the three driven links includes first to fourth arms arranged at intervals; and a flexible member that connects the first to fourth arms to each other in a parallelogram shape across the intervals and forms pivotable joints at the intervals.