The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 23, 2025
Filed:
Nov. 11, 2022
Applicant:
Microsoft Technology Licensing, Llc, Redmond, WA (US);
Inventors:
Di Sun, Bothell, WA (US);
Xiao Chuan Ong, Seattle, WA (US);
Seungwoo Lee, Redmond, WA (US);
Wyatt Owen Davis, Bothell, WA (US);
Assignee:
Microsoft Technology Licensing, LLC, Redmond, WA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G02B 26/10 (2006.01); G02B 26/08 (2006.01);
U.S. Cl.
CPC ...
G02B 26/105 (2013.01); G02B 26/0858 (2013.01);
Abstract
A method includes forming a mirror assembly for a scanning device that includes a mirror rotationally supported by flexible beams, the mirror assembly also including a piezoelectric material. The mirror is encased with a cover having a top scanning opening aligned with the mirror to form a scanning assembly. An interior of the scanning assembly is coated with a protective film. Etching is performed through the top scanning opening to remove the protective film from a top of the mirror.