The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 23, 2025
Filed:
May. 19, 2023
Applicant:
Foxsemicon Integrated Technology, Inc., Miao-Li Hsien, TW;
Inventors:
Assignee:
FOXSEMICON INTEGRATED TECHNOLOGY, INC., Miao-Li Hsien, TW;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01F 5/00 (2006.01); G01P 5/00 (2006.01); H01L 21/673 (2006.01);
U.S. Cl.
CPC ...
G01P 5/00 (2013.01); H01L 21/67389 (2013.01);
Abstract
A device includes one or more fixing members and one or more air speed measuring members. Each fixing members is received and held in one receiving groove. Each air speed measuring member is arranged on one fixing member. Each air speed measuring member includes one or more sensors. Each sensor extends outside the wafer box and is positioned below an air curtain. Each sensor is configured to measure an air speed near the air outlet of the air curtain. A related wafer box includes the above device.