The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 23, 2025

Filed:

Oct. 25, 2023
Applicant:

Kabushiki Kaisha Toshiba, Tokyo, JP;

Inventors:

Hiroshi Ohno, Tokyo, JP;

Hideaki Okano, Yokohama Kanagawa, JP;

Kenta Takanashi, Kawasaki Kanagawa, JP;

Takahiro Kamikawa, Yokohama Kanagawa, JP;

Hiroya Kano, Kawasaki Kanagawa, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01N 21/956 (2006.01); G01N 21/88 (2006.01);
U.S. Cl.
CPC ...
G01N 21/95607 (2013.01); G01N 21/8806 (2013.01); G01N 21/8851 (2013.01); G01N 2021/8825 (2013.01);
Abstract

According to one embodiment, an optical inspection method includes projecting first pattern light in a first basic modulation mode that periodically changes in bright and dark, onto an object, acquiring a first image by capturing an image of the object onto which the first pattern light has been projected, projecting second pattern light in a first inverted modulation mode in which bright and dark are inverted with respect to the first basic modulation mode, onto the object, acquiring a second image by capturing an image of the object onto which the second pattern light has been projected, and generating a singular light-scattered image in which a singular region including uniquely-scattered light that is extracted based at least on the first image and the second image is intensified.


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