The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 23, 2025

Filed:

Apr. 09, 2020
Applicant:

Fraunhofer-gesellschaft Zur Förderung Der Angewandten Forschung E. V., Munich, DE;

Inventors:

Michael Vergöhl, Braunschweig, DE;

Andreas Pflug, Braunschweig, DE;

Stefan Bruns, Braunschweig, DE;

André Kaiser, Braunschweig, DE;

Thomas Melzig, Braunschweig, DE;

Tobias Zickenrott, Braunschweig, DE;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 14/04 (2006.01); C23C 14/35 (2006.01); C23C 14/50 (2006.01); C23C 14/54 (2006.01); G02B 1/115 (2015.01); H01J 37/34 (2006.01);
U.S. Cl.
CPC ...
C23C 14/044 (2013.01); C23C 14/352 (2013.01); C23C 14/505 (2013.01); C23C 14/542 (2013.01); G02B 1/115 (2013.01); H01J 37/3473 (2013.01);
Abstract

According to the invention, a device is provided for coating substrates having planar or shaped surfaces by means of magnetron sputtering, by means of which device surfaces having any shape, for examples lenses, aspheres or freeform surfaces which have an adjustable layer-thickness profile, can be coated such that a layer function is maintained on the substantially complete surface. A method for coating substrates having planar or shaped surfaces by means of magnetron sputtering is also provided.


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