The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 23, 2025
Filed:
Feb. 24, 2022
Applicants:
Kabushiki Kaisha Toshiba, Tokyo, JP;
Toshiba Electronic Devices & Storage Corporation, Tokyo, JP;
Inventors:
Daisuke Koike, Tama Tokyo, JP;
Yuning Tsai, Yokohama Kanagawa, JP;
Assignees:
Kabushiki Kaisha Toshiba, Tokyo, JP;
Toshiba Electronic Devices & Storage Corporation, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C11D 3/28 (2006.01); C11D 1/00 (2006.01); C11D 3/20 (2006.01); C11D 3/43 (2006.01); C11D 7/32 (2006.01); C11D 7/50 (2006.01); H01L 21/48 (2006.01); H01L 21/56 (2006.01);
U.S. Cl.
CPC ...
C11D 7/3281 (2013.01); C11D 1/00 (2013.01); C11D 3/43 (2013.01); C11D 7/5013 (2013.01); H01L 21/4825 (2013.01); H01L 21/4835 (2013.01); H01L 21/565 (2013.01); C11D 2111/22 (2024.01);
Abstract
According to one embodiment, there is provided a cleaning agent. The cleaning agent includes an azole-based compound having a group including at least one selected from the group consisting of a glycidyl group, a hydrolyzable silyl group, and an amino group.