The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 23, 2025
Filed:
Jul. 08, 2021
Applicant:
Tosoh Corporation, Yamaguchi, JP;
Inventors:
Shuya Ikemura, Ayase, JP;
Hiroyuki Oike, Ayase, JP;
Yuki Yamamoto, Ayase, JP;
Teppei Hayakawa, Ayase, JP;
Assignee:
TOSOH CORPORATION, Yamaguchi, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C07F 7/28 (2006.01); C01B 21/076 (2006.01); C23C 16/34 (2006.01); H01L 21/285 (2006.01);
U.S. Cl.
CPC ...
C07F 7/28 (2013.01); C01B 21/0766 (2013.01); C23C 16/34 (2013.01); H01L 21/28568 (2013.01);
Abstract
A titanium complex useful for producing a titanium-containing thin film under low temperature deposition conditions without using an oxidative gas is provided. A titanium complex represented by the general formula (1) (wherein each of Rand Ris independently a Calkyl group which may be bonded with each other to form a ring, X is CRor a N atom, Y is CRor a N atom, Z is CRor a N atom, each of R, Rand Ris independently a hydrogen atom or a Calkyl group, and n is an integer of from 1 to 3).