Semiconductor memory device and manufacturing method of semiconductor memory device

Abstract

There are provided a semiconductor memory device and a manufacturing method of a semiconductor memory device. The manufacturing method of the semiconductor memory device includes: stacking a plurality of first material layers and a plurality of second material layers over a preliminary doped semiconductor structure; forming a blocking insulating layer, a data storage layer, a tunnel insulating layer, and a channel layer, which penetrate the plurality of first and second material layers, and extend to the inside of the preliminary doped semiconductor structure; forming a slit penetrating the plurality of first and second material layers; forming a protective structure as a double layer or a single layer on a sidewall of the slit; and forming a doped channel contact layer which penetrates a portion of the preliminary doped semiconductor structure in a direction intersecting the channel layer, and is in contact with the channel layer.