The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 16, 2025

Filed:

Apr. 13, 2022
Applicant:

Skyworks Solutions, Inc., Irvine, CA (US);

Inventors:

Stephen Joseph Kovacic, Newport Beach, CA (US);

Benjamin Paul Abbott, Irvine, CA (US);

Assignee:

SKYWORKS SOLUTIONS, INC., Irvine, CA (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H03H 9/13 (2006.01); H03H 3/04 (2006.01); H03H 9/17 (2006.01); H03H 9/56 (2006.01); H03H 9/60 (2006.01); H03H 3/02 (2006.01);
U.S. Cl.
CPC ...
H03H 9/132 (2013.01); H03H 3/04 (2013.01); H03H 9/173 (2013.01); H03H 9/564 (2013.01); H03H 9/605 (2013.01); H03H 2003/021 (2013.01); H03H 2003/0457 (2013.01);
Abstract

A film bulk acoustic wave resonator comprising a piezoelectric film having a central region defining a main active domain in which a main acoustic wave is generated during operation, an upper electrode disposed on a top surface of the piezoelectric film, a lower electrode disposed on a lower surface of the piezoelectric film, a dielectric material layer disposed on a lower surface of the lower electrode, and lower recessed frame regions disposed laterally on opposite sides of the central region, the lower recessed frame regions defined by regions of one of the dielectric material or of the lower electrode having a lesser thickness than the thickness of the one of the dielectric material layer or of the lower electrode in the central region.


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